AFLUNOX®
Electronics
AFLUNOX® PFPE oils and the greases derived from them are highly suitable for demanding applications, such as vacuum pumps exposed to aggressive environments, including the semiconductor industry.
Key properties include:
- Low vapor pressure
- Excellent heat resistance
- Excellent oxidation stability
- Compatible with various rubbers and plastics
- Does not dissolve or react with most chemicals, solvents or fuels
Key application areas include:
- Oil seals, O-rings, etc. of machines and devices in high vacuum environments
- Semiconductor manufacturing equipment
- Clean rooms and sputtering equipment
- Electron microscopes
- Vacuum pumps, vacuum deposition machines, and continuous vacuum plating equipment
